DSN-B MFM/MFC

Specifications:

Flow Range (equivalent N2): 0 ~ 5,10,20,30,50,100,200,300,500 SCCM;

                            0 ~ 1,2,3,5,10,20,30 SLM

Accuracy: ± 1% FS;

Repeatability: ± 0.2% FS

Response Time: electrical characteristics <10sec gas properties <1 ~ 4sec

Linearity: ± (0.5 ~ 1)% FS

Pressure Coefficient: 0.05 ~ 0.3MPa

Pressure: 3,10 MPa;

Temperature Range: 5 ~ 45 ℃

Set Point Signal and Flow Output Signal:from 0 to 5 VDC

Power Supply: +15V 500mA,-15V 500mA (input impedance greater than 100K,

             output current is not greater than 3mA)

Electrical Connector: D14pin

Size: 130 * 28 * 121mm

Weight: about 1.0kg

interface Size:

Swagelok: Φ3 .Φ6 .Φ10 .1 / 4 " . 3 / 8 "....

VCR connector: 1 / 4" . 3 / 8 ". 1 / 8 "........