Vacuum intermediate frequency coating equipment

Technological introduction

Arc and composite vacuum magnetron sputtering coating equipment by using electric arc ion plating and dc magnetron sputtering, intermediate frequency magnetron sputtering technique and pulse bias technology combined with the same coating machine, it can separate with arc or separate with magnetron sputtering coating, can also take advantage of the two technologies play a main role at different stages in the process of coating, such as in the initial use of arc coating of high energy particles bombarding cleaning and hit the bottom, to increase the film adhesion; Then sputtering with medium frequency middle main layer, can get fine and smooth tissue, can meet the needs of multifunctional coating.

The evaporative magnetron sputtering equipment is equipped with efficient resistance heating evaporation device and advanced cylinder or plane magnetron sputtering device. The organic combination of resistance heating evaporation coating technology and magnetron sputtering coating technology makes the equipment more suitable for a wide range of film layers with different properties.

Different parts to be plated are equipped with HVDC ion cleaning system and ac ion cleaning system. In particular, the high-density plasma of the ac ion cleaning system will clean the plated workpiece more thoroughly, so that the adhesion of the film and the workpiece significantly increased. The unique vertical double-door structure makes the loading and unloading of workpiece and plating material and coating process simultaneously, greatly improving the working effect.

Technical Parameters

 PVD coating technology

PVD coating is a plasma coating deposition technology.The vacuum chamber has to be absolutly sealed to avoid reaction between the vaporized material and air,so the materials should be vaporized under vacuum conditions.   PVD coating can provide new features to the products , such as improve the workpieces' hardness,wear resisitance,corrosion resisitance ect..

coating thickness            0.5-10μm

hardness                        1000-4000 HV

temperature resisitance    300-1150°c

deposition temperature     200-600°c

Watch industry (strap, case, dial)

Glass ceramics industry (glass tableware, ceramic crafts)

Hardware industry (sanitary ware, door knobs, locks)

Architecture industry (stainless steel plate, stair railings, columns)

Precision mold industry (standard punch mold, forming mold)

Tools industry (drill bits, carbide cutters, broaches, shaving heads)

Automotive industry (piston, piston rings, alloy wheels) 

Diffusion pump, rotary vane pump, roots pump, holding pump, pulse magnetron sputtering 

power, unipolar pulse power, frequency magnetron power, DC magnetron power, vacuum 

gauge, flange.